Polycrystalline Silicon for Integrated Circuit Applications 70174 Stuttgart soll im ersten Teil dieses

soll im ersten Teil dieses Beitrages behandelt werden

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discuss and stimulate developments in registration research and application at a meeting exclusively devoted to the topic

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Polycrystalline Silicon for Integrated Circuit Applications 70174 Stuttgart soll im ersten Teil diesesRecent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published